Electrochemical Deposition of Silver Oxide Nanostructure for CO2 Gas Sensing Application

Abstract

High-quality 3D silver oxide nanostructures (Ag₂O) were deposited in the form of nanocrystals on n-type Si using silver nitrate with low-cost and easily controlled technique, which is electrochemical deposition (ECD). Ag₂O has unique potential applications for CO₂ gas sensor. The manufacture of a high-performance CO₂ gas sensor can be achieved based on Ag₂O nanoparticles and growth conditions, such as annealing temperature of the samples produced. Images of Field Emission Scanning Electron Microscope (FESEM) showed Ag₂O nanoparticles in the form of crystals at different annealing temperatures. High crystallization was achieved with a low level of defects of Ag₂O nanostructures prepared at room temperature on Si for the sample annealed at 600 ºC. The XRD pattern showed that the prevailing peak is at (111). The real-time of start/stop was measured with and without CO₂ gas applied to a sensor manufactured based on Ag₂O nanostructures prepared, response time, recovery and sensitivity (3.8, 4.3 and 37.7%), respectively.