Physical investigation of In2O3:Sn thin films fabricated by chemical spray pyrolysis

Abstract

In₂O₃:Sn  (ITO) thin films were deposited for various Tin concentrations (0, 5, 10, 15, 20) % on glass substrates at substrate temperature equal to (450±10)℃ using the simple flexible and cost-effective spray pyrolysis technique. The structural and optical properties of these films have been investigated. The structure of the samples are polycrystalline with a cubic lattice crystal structure and the preferred growth way in the (400) trend. The optical properties of indium tin oxide thin films have been studied from the transmission and absorption spectrum in the wavelength interval from (300 - 1000) nm. The transmittance, optical band gap and Urbach energies of tin doped indium oxide have been investigated.