Theoretical Calculations For Sputtering Yield of Beryllium Surface Bombard By Deuterium Plasma Ions
Keywords:
sputtering process, TRIM program, plasma Deuterium ions, BerylliumAbstract
Extended calculations for sputtering yield through bombed Beryllium –
target by Deuterium ions plasma are accomplished .Accounts include
changing the input parameters: the energy of Deuterium ions plasma, the
hit target angle of Beryllium target, thickness of the Beryllium target layer,
The program TRIM is used to accomplish these calculations. Results show
that sputtering yield is directly dependent on these parameters. It can
change the incident angle of Deuterium ions and energy lead to a
significant change in Sputtering yield . On the other hand, the sputtering
yields are highly affected by changing target width at fixed ion parameters.
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Published
2020-08-12
How to Cite
A . Jawad, . E. (2020). Theoretical Calculations For Sputtering Yield of Beryllium Surface Bombard By Deuterium Plasma Ions. Mustansiriyah Journal for Sciences and Education, 17(1), 1–12. Retrieved from https://edumag.uomustansiriyah.edu.iq/index.php/mjse/article/view/581
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Research Article